n.微切削加工
A Micromachining Based Miniature Variable Optical Attenuator[J]. 引用该论文 万鹏
Micromachining Based Direct-Coupled Variable Optical Attenuator[J]. 引用该论文 晏辉鸣
A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology. 基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关。
The concepts of micromachining and Multi-Chip-Module (MCM) integrated from DC to RF components will be explained also. 文中将涉及微加工技术以及从直流至射频的多芯片全集成新概念。
Using surface micromachining, the sector plates are fabricated to verify the theoretical analysis. 利用面型微细加工制程，扇行平板结构被制造出来用以验证理论分析。
