n.三维轮廓仪
In order to minimize the measurement error,the contact surface contourgraph is designed based on vertical displacement scan. 为减小测量误差,设计了基于垂直位移扫描的接触式表面形貌仪。
Keywords ?Contourgraph;Measuring system;Computer appliation; 轮廓仪;测量系统;计算机应用;
Keywords Surface contourgraph Diffraction grating Linear motor Piezoelectric ceramic; 表面轮廓仪;衍射光栅;直线电机;压电陶瓷;
